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X-ray lithography
Results: 49

#	Item
11	Institute of Microstructure Technology (X-Ray-) Lithography and Galvanoforming – LIGA Micropatterning Technology for Highest Precision Microworks has developed LIGA technology to meet Add to Reading List Source URL: www.pkm.kit.edu Language: English - Date: 2015-04-10 09:36:35
12 $Atomic physics / Diffraction / Free-electron laser / Electron / X-ray scattering techniques / Photon / Extreme ultraviolet lithography / Physics / Quantum electrodynamics / Scattering$	PRL 110, week ending 7 JUNEPHYSICAL REVIEW LETTERS Add to Reading List Source URL: www.zannavi.com Language: English - Date: 2013-06-07 19:38:49 Atomic physics Diffraction Free-electron laser Electron X-ray scattering techniques Photon Extreme ultraviolet lithography Physics Quantum electrodynamics Scattering
13	www.elettra.trieste.it Elettra Sincrotrone Trieste Deep X-Ray Lithography E Add to Reading List Source URL: www.elettra.trieste.it Language: English - Date: 2012-10-15 05:11:07 Electromagnetism Microtechnology ELETTRA Trieste X-ray lithography Microelectromechanical systems Synchrotron Beamline Physics Particle accelerators Materials science
14	OSA International Workshop on Compact EUV & X-ray Light SourcesOctober 2014 ● Washington, DC, USA Organizing Committee Uwe Arp, National Institute of Standards and Technology Patrick Naulleau, Lawrence Berkeley Add to Reading List Source URL: www.osa.org Language: English - Date: 2014-10-31 11:41:03 Lawrence Berkeley National Laboratory Science and technology in the United States Technology Extreme ultraviolet lithography United States Department of Energy National Laboratories University of California
15	2012 Edition of the Annual Solar-Terrestrial Centre of Excellence (STCE) Workshop On-orbit degradation of solar and space weather Instruments – Lesson learned – Thursday May 3rd 2012 Add to Reading List Source URL: www.stce.be Language: English - Date: 2012-04-24 08:18:44 Solar telescopes Space telescopes X-ray telescopes LYRA Space weather Hinode SWAP Extreme ultraviolet lithography Solar Monitoring Observatory Spaceflight Spacecraft Space
16	2012 Edition of the Annual Solar-Terrestrial Centre of Excellence (STCE) Workshop On-orbit degradation of solar and space weather Instruments – Lesson learned – Thursday May 3rd 2012 Add to Reading List Source URL: stce.be Language: English - Date: 2012-04-24 08:18:44 Solar telescopes Space telescopes X-ray telescopes LYRA Space weather Hinode SWAP Extreme ultraviolet lithography Solar Monitoring Observatory Spaceflight Spacecraft Space
17	Extreme Ultraviolet Lithography: Towards the Next Generation of Integrated Circuits THE VIEWPOINT - Optical lattice solitons: Guiding and routing light at will Add to Reading List Source URL: opfocus.org Language: English - Date: 2010-03-11 13:42:27 Extreme ultraviolet lithography Multiple patterning Immersion lithography Photolithography Extreme ultraviolet Photoresist 11 nanometer X-ray lithography ASML Holding Microtechnology Materials science Technology
18	SLS Symposium on Nanostructures and Nanoparticles Tuesday, May 13, [removed]:00 to 11:45, WBGB[removed]:00 Surface sensitive measurements on the nanometer scale by means of grazing emission X-ray fluorescence Add to Reading List Source URL: www.psi.ch Language: English - Date: 2015-02-03 08:51:10 Spectroscopy Electromagnetic spectrum X-rays Scattering Extreme ultraviolet lithography Polymer physics Small-angle X-ray scattering X-ray fluorescence Interference lithography Electromagnetic radiation Physics Scientific method
19 $Optics / X-ray microscope / Diffraction / Extreme ultraviolet lithography / X-ray / Electron / Diffraction topography / Physics / Electromagnetic radiation / Microscopes$	Efficient focusing of 8 keV X-rays with multilayer Fresnel zone plates fabricated by atomic layer deposition and focused ion beam milling Add to Reading List Source URL: journals.iucr.org Language: English - Date: 2014-04-23 12:28:22 Optics X-ray microscope Diffraction Extreme ultraviolet lithography X-ray Electron Diffraction topography Physics Electromagnetic radiation Microscopes
20	EUVL for HVM: Progress and Risks Mark Phillips Intel Corporation International Workshop on EUV and Soft X-Ray Sources, 4 November 2014, Dublin, Ireland Add to Reading List Source URL: www.euvlitho.com Language: English - Date: 2014-11-29 19:16:54 Plasma physics Intel X-ray astronomy Astronomy Technology Extreme ultraviolet lithography Electromagnetic radiation Extreme ultraviolet

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